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Ultrapure & Industry
Water treatment for semiconductor production
With over 40 years of experience, EnviroFALK PharmaWaterSystems GmbH relies on a wide range of proven process technologies to develop customized and application-specific HIGH PURITY polishing systems. Our UPW systems achieve capacities of up to 20 m³/h and offer a combination of advanced filtration and polishing systems. The polishers of these systems, with a volume of up to 600 liters, are filled with high-quality semiconductor-grade resin to precisely meet the requirements of the semiconductor and high-tech industry.
Innovative Process Technology for Custom UPW Solutions
The requirements for ultra pure water (UPW) in semiconductor production and in the manufacture of sensitive micro parts for optics, solar and other high-tech applications are enormous. The required water quality varies depending on the surface finish, end product and process step, but in the end the same goal always counts: ULTRA PURE PROCESS WATER. This water has extremely low concentrations of dissolved ions (≥ 18.2 MegOhm), minimal organic impurities (TOC < 0.5 ppb), no particles (< 0.05 µm) and cations and anions in the lowest ppt range (< 5 ppt).
EnviroFALK PharmaWaterSystems GmbH offers customized solutions that are precisely tailored to these demanding requirements.
JUST PURE – JUST SAVE
The polishers in these UPW systems, with volumes of up to 600 liters, are exclusively filled with high-quality semiconductor-grade resins. Additional scavengers with TOC absorbers ensure the lowest organic content in ultrapure water, which can be further reduced to < 0.5 ppb TOC through additional UV oxidation. Furthermore, materials and media-contacting components are tailored to individual customer requirements: Basic Systems with PP piping or Advanced Systems with PVDF-HP piping (IR Plus® or WNF®).
Customized ultrapure water solutions for the semiconductor industry
EnviroFALK PharmaWaterSystems does not supply off-the-shelf solutions, but always develops customer-specific solutions, such as our patented Antistatic Pure Water System (APWS), which enables an increase in apparent conductivity in the sawing process of semiconductor production by individually dosing the CO2 input. Other innovations from our company include temperature control, cooling and dosing systems for ultrapure water.
Water treatment from EnviroFALK offers tangible benefits for the industry:
- Modular assemblies from 5–330 l/min for HIGH PURITY generation systems
- Configuration with polishing, microfiltration, ultrafiltration, UV disinfection, and TOC oxidation
- Degassing for oxygen reduction
- Minimal particle concentration in the submicron range
- Available as a package unit or in modular components
- Fully equipped with pre-treatment RO-EDI according to customer specifications
- Optional modular expandability for further processing and storage areas
- Reclaim unit for water recovery
- Achievement of maximum yields for resource efficiency
- Control system with Siemens S7-1200/1500 and ET200-SP, featuring basic HMI or IPC
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