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SiCrystal is one of the global market leaders in the production of single-crystal silicon carbide semiconductor wafers. These highly specialized products serve as the foundation for the production of innovative electronic components for key customers worldwide.
Silicon carbide wafers are precisely crafted disks, typically 350 micrometers thick (about 1/3 millimeter) and with a diameter of 150 millimeters. These wafers must meet extremely demanding specifications set by the customer, requiring highly sensitive manufacturing equipment.
The Solution: A Customized Ultrapure Water System for Maximum Purity by EnviroFALK
In close coordination with the engineering office and Wilhelm Werner GmbH, EnviroFALK PharmaWaterSystems developed an ultrapure water system that is perfectly tailored to the high demands of SiCrystal GmbH. The solution includes a MakeUp system with a production capacity of 4 m³/h, which delivers ultrapure deionized water with a conductivity of < 0.2 µS/cm through softening, reverse osmosis, and a CEDI stage.
This water is stored in a 20 m³ buffer tank, made of natural PP, and is protected from recontamination by a sterile filter and a CO2 adsorber. Two redundant ring-main pumps direct the water through parallel UV-oxidation units before it is fed into the three wet process subloops through ultrapure resin cartridges and 0.20 µm filtration.
The Benefits of EnviroFALK Water Treatment
Our customized solutions meet the highest purity standards and are specifically tailored to the requirements of semiconductor production. They ensure efficient and constant supply of ultrapure water for wet processes.
With compact and effective storage and distribution, the risk of recontamination is minimized. Timely implementation in close coordination with all involved parties ensures optimal system integration. At the same time, our reliable water treatment and distribution systems sustainably ensure product quality.
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